METHOD FOR PRODUCING PURE TRISILYLAMINE

A process for producing trisilylamine in the liquid phase by charging monochlorosilane in the liquid state in a solvent at elevated temperature, and reacting the monochlorosilane with NH3 in a stoichiometric excess is provided. Additionally provided is a production unit for carrying out the process.

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	HOPPE, Carl-Friedrich, GÖTZ, Christian, UEHLENBRUCK, Goswin
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMISTRY COMPOSITIONS BASED THEREON COMPOUNDS THEREOF INORGANIC CHEMISTRY MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONSONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS METALLURGY NON-METALLIC ELEMENTS ORGANIC CHEMISTRY ORGANIC MACROMOLECULAR COMPOUNDS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL THEIR PREPARATION OR CHEMICAL WORKING-UP THEIR RELEVANT APPARATUS TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A process for producing trisilylamine in the liquid phase by charging monochlorosilane in the liquid state in a solvent at elevated temperature, and reacting the monochlorosilane with NH3 in a stoichiometric excess is provided. Additionally provided is a production unit for carrying out the process.