METHOD AND DEVICE FOR INSPECTION OF A SEMICONDUCTOR DEVICE

A method for inspection of a semiconductor device (10) comprises: performing a processing step in manufacturing of the semiconductor device (10), wherein a compound is at least in contact with the semiconductor device (10); capturing an image on a two-dimensional image sensor (34) of an area of at l...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BLANCH, Carolina, DE WOLF, Ingrid, PODPOD, Arnita, JAYAPALA, Murali, SLABBEKOORN, John
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!