SPECTROSCOPE AND METHOD FOR PRODUCING SPECTROSCOPE
A spectrometer 1A includes a light detection element 20 having a substrate 24 made of a semiconductor material, a light passing part 21 provided in the substrate 24, and a light detection part 22 put in the substrate 24, a support 30 having a base wall part 31 opposing the light detection element 20...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A spectrometer 1A includes a light detection element 20 having a substrate 24 made of a semiconductor material, a light passing part 21 provided in the substrate 24, and a light detection part 22 put in the substrate 24, a support 30 having a base wall part 31 opposing the light detection element 20, and side wall parts 32 and 33 integrally formed with the base wall part 31, the light detection element 20 being fixed to the side wall parts 32 and 33, the support being provided with a wiring 13 electrically connected to the light detection part 22, and a dispersive part 40 provided on a surface 31a of the base wall part 31 on a side of a space S. An end part 13a of the wiring 13 is connected to a terminal 25 of the light detection element 20. An end part 13b of the wiring 13 is positioned on a surface 31b in the base wall part 31 on an opposite side from the side of the space S. |
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