SPECTROMETER, AND SPECTROMETER PRODUCTION METHOD

A spectrometer 1A includes a light detection element 20 provided with a light passing part 21 and a light detection part 22, a support 30 fixed to the light detection element 20 such that a space S is formed between the light passing part 21 and the light detection part 22, a first reflection part 1...

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Bibliographische Detailangaben
Hauptverfasser: YOKINO, Takafumi, SHIBAYAMA, Katsumi
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:A spectrometer 1A includes a light detection element 20 provided with a light passing part 21 and a light detection part 22, a support 30 fixed to the light detection element 20 such that a space S is formed between the light passing part 21 and the light detection part 22, a first reflection part 11 provided in the support 30 and configured to reflect light L1 passing through the light passing part 21 in the space S, a second reflection part 12 provided in the light detection element 20 and configured to reflect the light L1 reflected by the first reflection part 11 in the space S, and a dispersive part 40 provided in the support 30 and configured to disperse and reflect the light L1 reflected by the second reflection part 12 to the light detection part 22 in the space S.