MECHANICAL QUANTITY MEASURING DEVICE AND SENSOR UNIT

A mechanical quantity measuring device includes: a sensor chip having a strain detector formed on a surface of a semiconductor substrate and a plurality of electrodes connected to the strain detector; a stem having a seat that protrudes from an adjacent peripheral portion and has an upper surface th...

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Bibliographische Detailangaben
Hauptverfasser:	MIYAJIMA, Kentarou, HIO, Masayuki, SOMA, Atsuo, ASHIDA, Kisho, OOTA, Hiroyuki, HATA, Shohei, YAMAGUCHI, Takuto, KAZAMA, Atsushi, ONOZUKA, Junji, SHIMOKAWA, Hanae
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	A mechanical quantity measuring device includes: a sensor chip having a strain detector formed on a surface of a semiconductor substrate and a plurality of electrodes connected to the strain detector; a stem having a seat that protrudes from an adjacent peripheral portion and has an upper surface that is attached to a lower surface of the sensor chip by a bonding material formed from a metallic material or a glass material; a lead-out wiring part including a plurality of wires that are electrically connected to the plurality of electrodes; and a fixing part for fixing the stem, wherein: the stem and the fixing part are integrally molded or fixed through metallic bonding or mechanical bonding.