METHOD FOR THE PREPARATION OF OCTACHLORTRISILANE AND HIGHER POLYCHLORSILANES USING HEXACHLORODISILANE

METHOD FOR THE PREPARATION OF OCTACHLORTRISILANE AND HIGHER POLYCHLORSILANES USING HEXACHLORODISILANE

A controlled preparation of octachlorotrisilane and higher polychlorosilane such as DCTS and DCPS from monomeric chlorosilane, proceeds by exposing the chlorosilane to a nonthermal plasma and recycling chlorosilane that has not been converted to octachlorotrisilane into the plasma.

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Bibliographische Detailangaben
Hauptverfasser: LANG, Jürgen Erwin, Dr, TROCHA, Martin, Dr, BRAUSCH, Nicole, Dr, RAULEDER, Hartwig, Dr, MOUSSALLEM, Imad, Dr
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
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Beschreibung
Zusammenfassung:A controlled preparation of octachlorotrisilane and higher polychlorosilane such as DCTS and DCPS from monomeric chlorosilane, proceeds by exposing the chlorosilane to a nonthermal plasma and recycling chlorosilane that has not been converted to octachlorotrisilane into the plasma.