GRAVIMETRIC GAS SENSOR HAVING A LOWERED DETECTION LIMIT

GRAVIMETRIC GAS SENSOR HAVING A LOWERED DETECTION LIMIT

A gravimetric detector including a nanoelectronic structure including: a fixed part, at least one part suspended from the fixed part, an excitation device to vibrate the suspended part relative to the fixed part, a detector to detect variations in vibration of the suspended part, and a porous functi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: RICOUL, Florence, MATHERON, Muriel, JOUSSEAUME, Vincent, BARATTIN, Régis
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
WEIGHING
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Beschreibung
Zusammenfassung:A gravimetric detector including a nanoelectronic structure including: a fixed part, at least one part suspended from the fixed part, an excitation device to vibrate the suspended part relative to the fixed part, a detector to detect variations in vibration of the suspended part, and a porous functionalization layer at least partially covering the suspended part, porosity of the functionalization layer being between 3% and 50%.