RELATIVE HUMIDITY SENSOR AND METHOD

A relative humidity sensor (10; 20) is disclosed. The relative humidity sensor includes a first electrode (4; 24) and a second electrode (8; 26) disposed above a dielectric substrate (2; 22). A sensitive layer (6; 28) is disposed above at least one of the first electrode and the second electrode, wh...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Buiu, Octavian, Stratulat, Alisa, Brezeanu, Mihai, Bostan, Cazimir Gabriel, Serban, Bogdan-Catalin, Cobianu, Cornel P
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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