RELATIVE HUMIDITY SENSOR AND METHOD

RELATIVE HUMIDITY SENSOR AND METHOD

A relative humidity sensor (10; 20) is disclosed. The relative humidity sensor includes a first electrode (4; 24) and a second electrode (8; 26) disposed above a dielectric substrate (2; 22). A sensitive layer (6; 28) is disposed above at least one of the first electrode and the second electrode, wh...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Buiu, Octavian, Stratulat, Alisa, Brezeanu, Mihai, Bostan, Cazimir Gabriel, Serban, Bogdan-Catalin, Cobianu, Cornel P
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A relative humidity sensor (10; 20) is disclosed. The relative humidity sensor includes a first electrode (4; 24) and a second electrode (8; 26) disposed above a dielectric substrate (2; 22). A sensitive layer (6; 28) is disposed above at least one of the first electrode and the second electrode, where the sensitive layer is formed from a composition including a polyimide and a hydrophobic filler. A dust protection layer (12; 29) is disposed above the sensitive layer. In preferred embodiments, the hydrophobic filler comprises talc (Mg3Si4O10(OH)2) nanoparticles else lignin.