THIN-FILM RESONATOR MANUFACTURING METHOD AND DEVICE

Provided are a method and device for manufacturing a film resonator. The manufacturing method includes that: a thickness of each film layer which has been deposited is detected; when the detected thickness of any film layer which has been deposited is not in a standard thickness range, it is judged...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ZHANG, HAO, PANG, WEI, SUN, HAILONG, DU, LIANGZHEN, CHENG, WEI, JIANG, YUAN
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRONIC CIRCUITRY ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS
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