COMPOSITE CERAMIC ABRASIVE POLISHING SOLUTION

A polishing solution includes a fluid component and a plurality of ceramic abrasive composites. The ceramic abrasive composites include individual abrasive particles uniformly dispersed throughout a porous ceramic matrix. At least a portion of the porous ceramic matrix includes glassy ceramic materi...

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Bibliographische Detailangaben
Hauptverfasser: LEHUU, Duy K, LUGG, Paul S
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:A polishing solution includes a fluid component and a plurality of ceramic abrasive composites. The ceramic abrasive composites include individual abrasive particles uniformly dispersed throughout a porous ceramic matrix. At least a portion of the porous ceramic matrix includes glassy ceramic material. The ceramic abrasive composites are dispersed in the fluid component.