METHOD, SYSTEM AND INJECTION SUBSYSTEM FOR PRODUCING NANOTUBES

A floating catalyst chemical vapor deposition system produces nanotubes. The system includes a reaction chamber, a heater for heating a nanotube-material precursor and a catalyst precursor, and an injector for injecting the precursors into the chamber. In the chamber, the catalyst precursor is pyrol...

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Bibliographische Detailangaben
Hauptverfasser:	KOZIOL, Krzysztof Kazimierz, KURZEPA, Lukasz, JOAUG, Jerome Yi-Zhe, PAUKNER, Catharina
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBONFILAMENTS APPARATUS THEREFOR CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS,THREADS, FIBRES, BRISTLES OR RIBBONS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOUNDS THEREOF CRYSTAL GROWTH DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INORGANIC CHEMISTRY METALLURGY NATURAL OR ARTIFICIAL THREADS OR FIBRES NON-METALLIC ELEMENTS PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH SPINNING SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TEXTILES UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	A floating catalyst chemical vapor deposition system produces nanotubes. The system includes a reaction chamber, a heater for heating a nanotube-material precursor and a catalyst precursor, and an injector for injecting the precursors into the chamber. In the chamber, the catalyst precursor is pyrolysed to produce catalyst particles, and the nanotube-material precursor is pyrolysed in the presence of the catalyst particles in order to produce nanotubes. A controller controls at least one operational parameter, e.g., injection temperatures of the precursors, flow rates of carrier gases of the precursors, and a reaction temperature of the chamber and of the precursors. An injection pipe extends into the chamber to an adjustable extent in order to control the injection temperature of the catalyst precursor and/or the nanotube-material precursor.