PRESSURE SENSING ELEMENT COMPRISING AN ELECTRODE INCLUDING A PROTRUSION HAVING ELASTICITY

A pressure sensing element of an aspect of the present disclosure includes a first electrode including at least one protrusion having elasticity; a second electrode facing the at least one protrusion; and a dielectric disposed between the first electrode and the second electrode and including a firs...

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Bibliographische Detailangaben
Hauptverfasser:	NOINE, Keiji, MASUDA, Shinobu, EZAKI, Kenichi, OGURA, Tetsuyoshi
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
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Beschreibung
Zusammenfassung:	A pressure sensing element of an aspect of the present disclosure includes a first electrode including at least one protrusion having elasticity; a second electrode facing the at least one protrusion; and a dielectric disposed between the first electrode and the second electrode and including a first dielectric and a second dielectric. The first dielectric is disposed between a top of the at least one protrusion and the second electrode, and is in contact with each of the top of the at least one protrusion and the second electrode. The second dielectric is disposed between a first portion of the first electrode, the first portion not including the at least one protrusion, and the first dielectric.