X-RAY FLUORESCENCE ANALYZER AND X-RAY FLUORESCENCE ANALYZING METHOD

An X-ray fluorescence analyzer includes: a sample stage; an X-ray source; a detector; an X stage; a Y stage; a ¸ stage; and a shielding container, wherein the irradiation position with primary X-rays is set at an offset position from a movement center of the X stage and the Y stage, wherein an irrad...

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Bibliographische Detailangaben
1. Verfasser:	TAKAHARA, TOSHIYUKI
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	An X-ray fluorescence analyzer includes: a sample stage; an X-ray source; a detector; an X stage; a Y stage; a ¸ stage; and a shielding container, wherein the irradiation position with primary X-rays is set at an offset position from a movement center of the X stage and the Y stage, wherein an irradiation area that is irradiatable with the primary X-rays is set to a selected segmented area from among segmented areas that are defined by segmenting the surface of the sample into four parts with a virtual segment lines in the X direction and the Y direction passing through the movement center, and wherein the ¸ stage is configured to switch the selected segmented area into any one of the segmented areas by rotating the sample stage by every 90 degrees.