Semiconductor device and method
A semiconductor device and a method of making the same. The device includes a semiconductor substrate including a body region having a first conductivity type. The device also includes an array of interconnected trenches extending into the body region from a surface of the substrate. The device furt...
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| Hauptverfasser: | , |
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| Format: | Patent |
| Sprache: | eng ; fre ; ger |
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| Zusammenfassung: | A semiconductor device and a method of making the same. The device includes a semiconductor substrate including a body region having a first conductivity type. The device also includes an array of interconnected trenches extending into the body region from a surface of the substrate. The device further includes a plurality of channel stoppers. Each channel stopper includes a doped region of the first conductivity type located at a side of one or more of the trenches at a position intermediate a top of the trench and a bottom of the trench. |
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