SPECIMEN PREPARATION DEVICE

SPECIMEN PREPARATION DEVICE

A specimen preparation device (100) prepares a cross section of a specimen (2) by applying an ion beam, the specimen preparation device including: an ion beam generator (10) that generates the ion beam; a specimen holder (20) that holds the specimen (2); a shield plate (30) that shields part of the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SAKUDA, Yusuke, ASAHINA, Shunsuke
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A specimen preparation device (100) prepares a cross section of a specimen (2) by applying an ion beam, the specimen preparation device including: an ion beam generator (10) that generates the ion beam; a specimen holder (20) that holds the specimen (2); a shield plate (30) that shields part of the specimen from the ion beam; and a tilted plate (60) that is placed to intersect a path of the ion beam on a downstream side of the specimen (2), and has an incidence surface that is tilted relative to a direction in which the ion beam is incident.