CHARGED PARTICLE MICROSCOPE WITH BAROMETRIC PRESSURE CORRECTION

A method of using a Charged Particle Microscope, comprising the following steps: - Providing a specimen on a specimen holder; - Directing a beam of charged particles from a source through an illuminator so as to irradiate the specimen; - Using a detector to detect a flux of radiation emanating from the specimen in response to said irradiation, particularly comprising the following steps: - Providing the microscope with a barometric pressure sensor; - Providing an automatic controller with a pressure measurement signal from said barometric pressure sensor; - Invoking said controller to use said signal as input to a control procedure, to compensate for a relative positional error of said beam and said specimen holder on the basis of said signal.