HIGH RELIABILITY, LONG LIFETIME, NEGATIVE ION SOURCE

HIGH RELIABILITY, LONG LIFETIME, NEGATIVE ION SOURCE

A negative ion source includes a plasma chamber, a microwave source, a negative ion converter, a magnetic filter and a beam formation mechanism. The plasma chamber contains gas to be ionized. The microwave source transmits microwaves to the plasma chamber to ionize the gas into atomic species includ...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CAMPBELL, Logan, D, SWANSON, Daniel J, BARROWS, Preston, J, RISLEY, Eric, D, GRIBB, Tye, T, KOBERNIK, Arne, V, MEANEY, Kevin, D, SHERMAN, Joseph, D, SEYFERT, Christopher, M, SENGBUSCH, Evan, R, RADEL, Ross, F, LEE, Jin, W
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:A negative ion source includes a plasma chamber, a microwave source, a negative ion converter, a magnetic filter and a beam formation mechanism. The plasma chamber contains gas to be ionized. The microwave source transmits microwaves to the plasma chamber to ionize the gas into atomic species including hyperthermal neutral atoms. The negative ion converter converts the hyperthermal neutral atoms to negative ions. The magnetic filter reduces a temperature of an electron density provided between the plasma chamber and the negative ion converter. The beam formation mechanism extract the negative ions.