THIN FILM FABRICATING APPARATUS

A thin film fabricating apparatus includes: an electrode bath (6) which contains a thin film-forming material (5); a plurality of needle electrodes (4) disposed in the electrode bath (6); a plurality of ring electrodes (3) disposed on the electrode bath (6) at positions corresponding to the needle e...

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Bibliographische Detailangaben
Hauptverfasser:	NOBUO, Hamamoto, HIROSHI, Miyazaki
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ATOMISING APPARATUS ELECTRICITY NOZZLES PERFORMING OPERATIONS SPRAYING APPARATUS SPRAYING OR ATOMISING IN GENERAL TRANSPORTING
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Beschreibung
Zusammenfassung:	A thin film fabricating apparatus includes: an electrode bath (6) which contains a thin film-forming material (5); a plurality of needle electrodes (4) disposed in the electrode bath (6); a plurality of ring electrodes (3) disposed on the electrode bath (6) at positions corresponding to the needle electrodes (4); and a substrate stand (1) disposed opposite to the needle electrodes (4) and the ring electrodes (3), where the substrate stand holds the substrate (2), on which a thin film is to be formed.