DEGASSING DEVICE

Provided is a degassing device which allows efficient maintenance. This degassing device is provided with upper and lower rollers (18A, 18B) which advance a film-forming material (10) in an advancement direction while vertically conveying the same, a plate heater (12) arranged adjacently to the film...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	OHBA, NAOKI, SEGAWA, TOSHIKI
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	Provided is a degassing device which allows efficient maintenance. This degassing device is provided with upper and lower rollers (18A, 18B) which advance a film-forming material (10) in an advancement direction while vertically conveying the same, a plate heater (12) arranged adjacently to the film-forming material (10) moving back and forth between the rollers, and a chamber (14) having an outer wall. The outer wall includes a front wall (20) and a rear wall (22) each having an upper roller support unit (20a, 22a) and a lower roller support unit (20b, 22b). In at least one of the front wall (20) and the rear wall (22), a between-roller opening (40, 42) is formed in the region between the upper roller support unit and the lower roller support unit, and said between-roller openings (40, 42) have a shape cutting across the moving film-forming material (10) and the plate heater (12) in the advancement direction.