TURNING VANE

The disclosed embodiments include a mass flow controller for controlling a flow of a fluid. In one embodiment, the mass flow controller comprises an inlet for receiving the fluid; a flow path in which the fluid passes through the mass flow controller; a mass flow meter for providing a signal corresp...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	ALTONJI, ROBERT W, WANG, GUOGING, DILLE, JOSEPH C
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS BLASTING FLUID DYNAMICS, i.e. METHODS OR MEANS FOR INFLUENCING THE FLOWOF GASES OR LIQUIDS FLUID-PRESSURE ACTUATORS HEATING HYDRAULICS OR PNEUMATICS IN GENERAL LIGHTING MEASURING MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL MECHANICAL ENGINEERING METERING BY VOLUME PHYSICS TARIFF METERING APPARATUS TESTING WEAPONS
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Beschreibung
Zusammenfassung:	The disclosed embodiments include a mass flow controller for controlling a flow of a fluid. In one embodiment, the mass flow controller comprises an inlet for receiving the fluid; a flow path in which the fluid passes through the mass flow controller; a mass flow meter for providing a signal corresponding to mass flow of the fluid through the flow path, the mass flow meter having a bypass through which a majority of fluid flows; a turning vane positioned upstream of the bypass for generating a more uniform fluid flow; an adjustable valve for regulating the flow of the fluid out of an outlet of the mass flow controller; and a controller configured to apply a valve control signal to adjust the adjustable valve to a desired valve position to control the flow of the fluid out of an outlet of the mass flow controller.