WORK CHAMBER

A working chamber includes: a body case including a work space; a supply device configured to supply gas in a body case; a work plate having an opening formed therein, the work plate configuring a bottom surface of the work space; and an observation device capable of being lifted and lowered, and th...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KOBAYASHI, KOICHI, YOKOI, YASUHIKO
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A working chamber includes: a body case including a work space; a supply device configured to supply gas in a body case; a work plate having an opening formed therein, the work plate configuring a bottom surface of the work space; and an observation device capable of being lifted and lowered, and the observation device includes a receiving portion having a width greater than a gap between the work plate and the observation device in an in-use state, and the receiving portion is configured to close the gap between the observation device and the work plate in the in-use state.