CONVEYANCE SYSTEM

A conveyance system that can prevent the conveyance carriages from entering by mistake is provided. The conveyance system 1 includes: a rail R that is constructed across a plurality of areas; a FOUP conveyance vehicle 10 that travels along the rail R; a reticle conveyance vehicle 20 that has a width...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	IZUMI Takanori
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CONTROLLING CONVEYING EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PHYSICS PNEUMATIC TUBE CONVEYORS RAILWAY SYSTEMS RAILWAYS REGULATING SHOP CONVEYOR SYSTEMS STORING SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	A conveyance system that can prevent the conveyance carriages from entering by mistake is provided. The conveyance system 1 includes: a rail R that is constructed across a plurality of areas; a FOUP conveyance vehicle 10 that travels along the rail R; a reticle conveyance vehicle 20 that has a width and a height at least one of which differs from that of the FOUP conveyance vehicle 10; an optical sensor 15 that is provided to the FOUP conveyance vehicle 10, arranged at a position that does not overlap the rectile conveyance vehicle 20 in a traveling direction, and detects an obstacle in front; and a member 30 to be detected that is arranged, in an entry section into a certain area where only the rectile conveyance vehicle 20 is allowed to enter out of a plurality of areas, at a position where the rectile conveyance vehicle 20 is allowed to enter the certain area, the position being detectable by the optical sensor 15 provided to the FOUP conveyance vehicle 10.