MULTI-LAYER STRUCTURE, CAPACITOR ELEMENT, AND METHOD FOR MANUFACTURING SAME

The multilayered structure includes: a substrate (10); a buffer layer (12) disposed on the substrate (10); a lower electrode (14) disposed on the buffer layer (12), and a dielectric layer (16) disposed on the lower electrode (14), the dielectric layer composed of nitrides. Furthermore, the capacitor...

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Bibliographische Detailangaben
Hauptverfasser:	KANETAKE, Yasuo, TSURUMI, Naoaki
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC,OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWERSUPPLY SYSTEMS BASIC ELECTRIC ELEMENTS BLASTING CAPACITORS CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CONTROL OR REGULATION THEREOF CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUTPOWER CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS ORMACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS,CLIPS, WEDGES, JOINTS OR JOINTING DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS GENERATION HEATING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIGHTING MECHANICAL ENGINEERING METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THERMAL INSULATION IN GENERAL WEAPONS
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Beschreibung
Zusammenfassung:	The multilayered structure includes: a substrate (10); a buffer layer (12) disposed on the substrate (10); a lower electrode (14) disposed on the buffer layer (12), and a dielectric layer (16) disposed on the lower electrode (14), the dielectric layer composed of nitrides. Furthermore, the capacitor element includes: an upper electrode (18) disposed on the dielectric layer (16), a first terminal electrode connected to the lower electrode (14), and a second terminal electrode connected to the upper electrode (18). There is provided a capacitor element excellent in high-temperature stability, and a fabrication method of such a capacitor element.