Device for detecting particles in a liquid and method for detecting particles in a liquid

A device, which detects particles in a liquid, includes: a flow cell through which a liquid flows; a light source that illuminates the flow cell with an inspection beam; a scattered light detector that detects scattered light that is produced in a region illuminated by the inspection beam; and an ev...

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Bibliographische Detailangaben
Hauptverfasser: FURUYA, MASASHI, OBARA, DAISUKE
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A device, which detects particles in a liquid, includes: a flow cell through which a liquid flows; a light source that illuminates the flow cell with an inspection beam; a scattered light detector that detects scattered light that is produced in a region illuminated by the inspection beam; and an evaluating portion that evaluates that a particle is included in the liquid when the scattered light is detected for less than a prescribed time and evaluates that the flow cell is not filled with the liquid when the scattered light is detected for more than a prescribed time.