VACUUM PUMP

PROBLEM TO BE SOLVED: To provide a vacuum pump or a rotary unit for a vacuum pump in which a rotor-side bearing member and/or a stator-side bearing member are protected easily and at low cost in manufacturing technology from corrosion and/or embrittlement for a long period of time.SOLUTION: The rota...

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Hauptverfasser: Wirth, Adrian, Vorwerk, Peter
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Sprache:eng ; fre ; ger
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creator Wirth, Adrian
Vorwerk, Peter
description PROBLEM TO BE SOLVED: To provide a vacuum pump or a rotary unit for a vacuum pump in which a rotor-side bearing member and/or a stator-side bearing member are protected easily and at low cost in manufacturing technology from corrosion and/or embrittlement for a long period of time.SOLUTION: The rotary unit 24 for a turbo-molecular pump comprising a rotor 14, a stator, and a magnetic bearing part 42, is provided with a gas tight enclosure for the rotor-side bearing part component 44, the enclosure having a rotor-side protection wall, and the protection wall covering the side surface of the rotor-side bearing part component 44, and is characterized in that the rotor-side protection wall and the rotor 14 are welded gas-tightly, in particular, welded by cold welding, friction stir welding, laser beam welding, or electron beam welding, and/or a stator-side protection wall and a stator are welded gas-tightly, in particular, welded by cold welding, friction stir welding, laser beam welding, or electron beam welding.
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language eng ; fre ; ger
recordid cdi_epo_espacenet_EP2933496B1
source esp@cenet
subjects BEARINGS
BLASTING
CLADDING OR PLATING BY SOLDERING OR WELDING
CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING
ELEMENTS OR CRANKSHAFT MECHANISMS
ENGINEERING ELEMENTS AND UNITS
FLEXIBLE SHAFTS
GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS
HEATING
LIGHTING
MACHINE TOOLS
MECHANICAL ENGINEERING
METAL-WORKING NOT OTHERWISE PROVIDED FOR
NON-POSITIVE DISPLACEMENT PUMPS
PERFORMING OPERATIONS
POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS
PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
ROTARY BODIES OTHER THAN GEARING ELEMENTS
SHAFTS
SOLDERING OR UNSOLDERING
THERMAL INSULATION IN GENERAL
TRANSPORTING
WEAPONS
WELDING
WORKING BY LASER BEAM
title VACUUM PUMP
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