VACUUM PUMP

PROBLEM TO BE SOLVED: To provide a vacuum pump or a rotary unit for a vacuum pump in which a rotor-side bearing member and/or a stator-side bearing member are protected easily and at low cost in manufacturing technology from corrosion and/or embrittlement for a long period of time.SOLUTION: The rota...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Wirth, Adrian, Vorwerk, Peter
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BEARINGS BLASTING CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING ELEMENTS OR CRANKSHAFT MECHANISMS ENGINEERING ELEMENTS AND UNITS FLEXIBLE SHAFTS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MACHINE TOOLS MECHANICAL ENGINEERING METAL-WORKING NOT OTHERWISE PROVIDED FOR NON-POSITIVE DISPLACEMENT PUMPS PERFORMING OPERATIONS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS ROTARY BODIES OTHER THAN GEARING ELEMENTS SHAFTS SOLDERING OR UNSOLDERING THERMAL INSULATION IN GENERAL TRANSPORTING WEAPONS WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a vacuum pump or a rotary unit for a vacuum pump in which a rotor-side bearing member and/or a stator-side bearing member are protected easily and at low cost in manufacturing technology from corrosion and/or embrittlement for a long period of time.SOLUTION: The rotary unit 24 for a turbo-molecular pump comprising a rotor 14, a stator, and a magnetic bearing part 42, is provided with a gas tight enclosure for the rotor-side bearing part component 44, the enclosure having a rotor-side protection wall, and the protection wall covering the side surface of the rotor-side bearing part component 44, and is characterized in that the rotor-side protection wall and the rotor 14 are welded gas-tightly, in particular, welded by cold welding, friction stir welding, laser beam welding, or electron beam welding, and/or a stator-side protection wall and a stator are welded gas-tightly, in particular, welded by cold welding, friction stir welding, laser beam welding, or electron beam welding.