ROLLER-TYPE PRESSURIZATION DEVICE, IMPRINTER, AND ROLLER-TYPE PRESSURIZATION METHOD

A roller-type depressing device that can depress an object like a die or a molding target by controlling the pressure of a roller, an imprint device and an imprint method utilizing the same are provided. A roller-type depressing device is to depress the object like a die 1 or a molding target 2 by a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	KAWAGUCHI Hirosuke, TANIGUCHI Yutaka, TANAKA Satoru
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS SEMICONDUCTOR DEVICES SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Beschreibung
Zusammenfassung:	A roller-type depressing device that can depress an object like a die or a molding target by controlling the pressure of a roller, an imprint device and an imprint method utilizing the same are provided. A roller-type depressing device is to depress the object like a die 1 or a molding target 2 by a main roller 38, and includes a pressure adjusting plate provided with the main roller 38, a roller moving unit that moves the main roller 38 relative to the object, a pressure adjusting unit that holds the pressure adjusting plate 332 in such a way that force produced by a pressure difference in fluid applied to both faces of the pressure adjusting plate 332 acts on the main roller 38, a pressure receiving stage 322 receiving pressure of the main roller 38 via the object, a pressure adjuster that adjusts the pressure difference in fluid applied to both faces of the pressure adjusting plate 332, and a pressure equalizer (backup rollers 39) that equalizes, in an axial direction thereof, pressure applied to the object by the main roller 38.