INTEGRATED CIRCUIT WITH NANOWIRE SENSORS COMPRISING A SHIELDING LAYER, SENSING APPARATUS, MEASURING METHOD AND MANUFACTURING METHOD

An integrated circuit (100) comprising a substrate (110); an insulating layer (120) over said substrate; and a first nanowire element (140a) and a second nanowire element (140b) adjacent to said first nanowire element on said insulating layer; wherein the first nanowire element is arranged to be exp...

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Bibliographische Detailangaben
Hauptverfasser: MESCHER, MARLEEN, DE WILD, NICO, MARIS, ADRIAAN, KLOOTWIJK, JOHAN, HENDRIK, ALARCON-RIVERO, MANUEL, EDUARDO
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:An integrated circuit (100) comprising a substrate (110); an insulating layer (120) over said substrate; and a first nanowire element (140a) and a second nanowire element (140b) adjacent to said first nanowire element on said insulating layer; wherein the first nanowire element is arranged to be exposed to a medium comprising an analyte of interest, and wherein the second nanowire element is shielded from said medium by a shielding layer (150) over said second nanowire element. A sensing apparatus including such an IC, a sensing method using such an IC and a method of manufacturing such an IC are also disclosed.