ACCELERATION SENSOR

An acceleration sensor includes: an X detection portion (10) that detects acceleration in an X direction by swinging a first movable electrode (11) about a pair of beam portions (12a, 12b); a Y detection portion (20) that detects acceleration in a Y direction perpendicular to the X direction by swin...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	UEDA, HIDEKI, GODA, KAZUO, IBARA, NOBUYUKI, MORI, TAKESHI, TAURA, TAKUMI
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	An acceleration sensor includes: an X detection portion (10) that detects acceleration in an X direction by swinging a first movable electrode (11) about a pair of beam portions (12a, 12b); a Y detection portion (20) that detects acceleration in a Y direction perpendicular to the X direction by swinging a second movable electrode (21) about a pair of beam portions (22a, 22b); and a Z detection portion (30) that detects acceleration in a Z direction by moving a third movable electrode (31), which is held by two pairs of beam portions (32a, 32b, 32c, 32d) in parallel in the vertical direction, characterized in that the X detection portion (10), the Y detection portion (20) and the Z detection portion (30) are arranged in one chip.