Method of detecting arcs in a plasma process and power supply for supplying an output quantity to a plasma process

In a Method of detecting arcs in a plasma process which is supplied by a power supply (1) with an output quantity (Uout, Iout, Pout), wherein the output quantity (Uout, Iout, Pout) is compared with an arc detection threshold value (Iarc_thres, Uarc_thres) and an arc is detected if the output quantit...

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Bibliographische Detailangaben

Hauptverfasser:	Gieraltowski, Andrzej, Dr Zelechowski, Marcin, Lach, Piotr, Kolasinski, Piotr
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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