LINEAR MOTION DEVICE

There is provided a linear device which can greatly reduce an amount of leakage of fine particles which are produced between a rolling element raceway and rolling elements to the outside of the device and which is therefore suitable for a semiconductor production apparatus or liquid crystal display...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	OOKUBO, TSUTOMU, YAMAMOTO, KAZUHITO
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BEARINGS BLASTING ELEMENTS OR CRANKSHAFT MECHANISMS ENGINEERING ELEMENTS AND UNITS FLEXIBLE SHAFTS GEARING GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING ROTARY BODIES OTHER THAN GEARING ELEMENTS SHAFTS THERMAL INSULATION IN GENERAL WEAPONS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	There is provided a linear device which can greatly reduce an amount of leakage of fine particles which are produced between a rolling element raceway and rolling elements to the outside of the device and which is therefore suitable for a semiconductor production apparatus or liquid crystal display panel production apparatus or other clean environment. In a linear device (1), each of a pair of seal members (7) is formed to a shape which has a clearance (5) of 0.025 to 0.15 mm in range with respect to a raceway member (2) when cut along a direction perpendicular to the axial direction of the raceway member (2) in a state attached to a moving member (3) Grease with a worked penetration of 175 to 250 is coated between the rolling element raceway (5) and the rolling elements (4).