Multiple sense axis MEMS gyroscope having a single drive mode

A gyroscope (20) includes a first drive mass (22) driven in a first drive motion (140) along a first axis (100), the first drive motion (140) generating a first sense motion (144) of a first sense mass (68) in response to rotation of the gyroscope (20). The gyroscope (20) further includes a second drive mass (24) driven in a second drive motion (142) along a second axis (102) that is transverse to the first axis (100). The second drive motion (142) generates a second sense motion (146) of a second sense mass (70) in response to rotation of the gyroscope (20). A drive spring system (36) interconnects the two drive masses (22, 24) to couple the first and second drive motions (140, 142) so that a single drive mode (98) can be implemented. The sense motion (144, 146) of each sense mass (68, 70) is along a third axis (118), where the third axis (118) is transverse to the other axes (100, 102). The sense motion (144, 146) is translational motion such the sense masses (68, 70) remain parallel to the surface (30) of the substrate (32).