SCRIBING WHEEL AND METHOD FOR MANUFACTURING SAME
A circumference of a scribing wheel is ground in a V-shape, and a diamond film is formed on a ground surface. Then, performing rough grinding so as to make a zonal area including the ridge line at the tip of the V-shape have an apex angle ±2 forms a ground surface 15. Further, performing final grind...
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Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A circumference of a scribing wheel is ground in a V-shape, and a diamond film is formed on a ground surface. Then, performing rough grinding so as to make a zonal area including the ridge line at the tip of the V-shape have an apex angle ±2 forms a ground surface 15. Further, performing final grinding of a zonal area including the ridge line of the ground surface 15 until the arithmetic average roughness of a ground surface 16 becomes 0.03 µm or less forms the ground surface 16 having an apex angle of ±3. Doing so can reduce irregularities of the ridge line and tilted surfaces of the blade edge to improve the end surface strength of a brittle material substrate after scribing. |
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