METHOD AND APPARATUS FOR MEASURING THE GEOMETRIC STRUCTURE OF AN OPTICAL COMPONENT

The method involves measuring (S1) a signal (MS1) from conversion of a probe signal by a side of an optical component, and measuring (S2) another signal (MS2) resulting from another conversion of another probe signal by another side. A third conversion is determined (S3) to convert a set of coordina...

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Bibliographische Detailangaben
Hauptverfasser:	LAKHOUA, Asma, GUEU, Stéphane, MURADORE, Fabien, LAVILLONNIERE, Nicolas
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	The method involves measuring (S1) a signal (MS1) from conversion of a probe signal by a side of an optical component, and measuring (S2) another signal (MS2) resulting from another conversion of another probe signal by another side. A third conversion is determined (S3) to convert a set of coordinates (R1) to another set of coordinates (R2). The sides are estimated (S10) by using the former signal and the latter signal, simulation of conversions and cost criteria quantifying difference between the former estimation and the former signal and between the latter estimation and the latter signal. An independent claim is also included for a system for measuring a geometric structure of an optical component.