FLUID DELIVERY SYSTEM AND METHOD

A fluid supply system adapted for vacuum and pressure cycling of fluid, including a transfer vessel adapted to supply a process canister with fluid drawn from a bulk canister under a vacuum, wherein delivery of fluid from the transfer vessel to the process canister is accomplished with positive pres...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TOM, GLENN, M, MCFERON, MITCHELL, W, CHISM, RICHARD, D, WARE, DONALD, D, HODGES, JORDAN
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A fluid supply system adapted for vacuum and pressure cycling of fluid, including a transfer vessel adapted to supply a process canister with fluid drawn from a bulk canister under a vacuum, wherein delivery of fluid from the transfer vessel to the process canister is accomplished with positive pressure. A method is also disclosed of delivering fluid, including drawing fluid under vacuum from a bulk canister and pressurizing the transfer vessel to effect dispensing of the fluid into a process canister for delivery to a location of use.