DEVICE AND METHOD FOR REFINING SILICON

DEVICE AND METHOD FOR REFINING SILICON

In this method for refining silicon by vacuum melting, the falling of impurity condensate from an impurity trap located above a crucible and contamination of the molten silicon are prevented. A crucible (4) for housing molten silicon (3), and a heating means (5) for heating the crucible (4) are loca...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: DOHNOMAE, HITOSHI
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
CHEMISTRY
COMPOUNDS THEREOF
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEPARATION
TRANSPORTING
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Beschreibung
Zusammenfassung:In this method for refining silicon by vacuum melting, the falling of impurity condensate from an impurity trap located above a crucible and contamination of the molten silicon are prevented. A crucible (4) for housing molten silicon (3), and a heating means (5) for heating the crucible (4) are located inside a treatment chamber (2) equipped with a vacuum pump (1); further provided are: an impurity trap having an impurity condensation unit for cooling and condensing the vapor of impurities evaporating from the liquid surface of the molten silicon; and a contamination prevention device for preventing contamination of the molten silicon, having an impurity catch unit for catching impurities when impurities trapped by the impurity trap fall.