Optical deflector including separated piezoelectric portions on piezoelectric actuators

In an optical deflector including a mirror (1), a frame (4, 4'), first and second torsion bars (2a, 2b, 2'a, 2'b), first and second piezoelectric actuators (3'-1, 3'-2, 3"-1, 3"-2) coupled to both of the first and second torsion bars (2a, 2b, 2'a, 2'b), a...

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Bibliographische Detailangaben
Hauptverfasser: TANI, MASANAO, YASUDA, YOSHIAKI
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:In an optical deflector including a mirror (1), a frame (4, 4'), first and second torsion bars (2a, 2b, 2'a, 2'b), first and second piezoelectric actuators (3'-1, 3'-2, 3"-1, 3"-2) coupled to both of the first and second torsion bars (2a, 2b, 2'a, 2'b), and first and second coupling bars (5-1, 5-2), each of the first and second piezoelectric actuators (3'-1, 3'-2, 3"-1, 3"-2) is divided into first, second and third areas (G1, G2) in accordance with a polarization polarity distribution obtained by performing a predetermined simulation upon the optical deflector where piezoelectric portions with no slits are hypothetically provided in the first and second piezoelectric actuators (3'-1, 3'-2, 3"-1, 3"-2) while a predetermined rocking operation is performed upon the mirror (1). First piezoelectric portions (3'-11, 3'-13, 3"-11, 3"-13) are formed in the first and third areas of the first piezoelectric actuator (3'-1, 3"-1), and second piezoelectric portions (3'-21, 3'-23, 3"-21, 3"-23) are formed in the first and third areas of said second piezoelectric actuator (3'-2, 3"-2). A first drive voltage (V Y1 ) applied to the first piezoelectric portions is opposite in phase to a second drive voltage (V Y2 ) applied to the second piezoelectric portions.