METHOD FOR MANUFACTURING A RESONATOR

The method involves modifying a structure of a substrate zone using a laser so as to render the zone as more selective. The zone is etched so as to selectively fabricate a resonator (300) that includes a base (302) from which parallel arms (304) are extended, where each arm presents an upper face an...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DALLA PIAZZA, Silvio, HESSLER, Thierry
Format: Patent
Sprache:eng ; fre ; ger
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