METHOD FOR MANUFACTURING A RESONATOR

The method involves modifying a structure of a substrate zone using a laser so as to render the zone as more selective. The zone is etched so as to selectively fabricate a resonator (300) that includes a base (302) from which parallel arms (304) are extended, where each arm presents an upper face an...

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Bibliographische Detailangaben
Hauptverfasser: DALLA PIAZZA, Silvio, HESSLER, Thierry
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:The method involves modifying a structure of a substrate zone using a laser so as to render the zone as more selective. The zone is etched so as to selectively fabricate a resonator (300) that includes a base (302) from which parallel arms (304) are extended, where each arm presents an upper face and a lower face. A recess (310) is formed on one of the faces of the arms. The resonator is released from a substrate, where the substrate is made of single-crystal material, polycrystalline material, polymer and of amorphous materials such as ceramics or glass. An independent claim is also included for a resonator.