APPARATUS FOR ADJUSTING RADIATION SPOT SIZE

An apparatus can include a first beam cropper configured to crop a portion of a radiation pulse having a first spot size to form an intermediate cropped radiation pulse having an intermediate cropped spot with an intermediate cropped spot size less than the first spot size; and a second beam cropper...

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Bibliographische Detailangaben
Hauptverfasser: SUMERFIELD, Leif, O'CONNOR, Ciaran John Patrick, HILLIARD, Shane
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:An apparatus can include a first beam cropper configured to crop a portion of a radiation pulse having a first spot size to form an intermediate cropped radiation pulse having an intermediate cropped spot with an intermediate cropped spot size less than the first spot size; and a second beam cropper configured to crop the intermediate cropped spot to form a second cropped radiation pulse having a second cropped spot with a second cropped spot size less the intermediate cropped spot size.