METHOD FOR MANUFACTURING NOZZLE CHIPS

The present invention provides a method of making a nozzle chip including a step of forming an ejection orifice row by performing irradiation with light rays by using a mask having ejection orifice row patterns that form an ejection orifice row pattern of one nozzle chip when the ejection orifice ro...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: MANABE Takanobu, ASAI, Kazuhiro, TAGAWA, Yoshinori, FUJII Kenji, WATANABE Makoto, KUROSU Toshiaki
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The present invention provides a method of making a nozzle chip including a step of forming an ejection orifice row by performing irradiation with light rays by using a mask having ejection orifice row patterns that form an ejection orifice row pattern of one nozzle chip when the ejection orifice row patterns are connected to each other through a connection portion. The mask is configured such that, with respect to a direction in which ejection orifices of the ejection orifice row are arranged, the absolute value of off-axis telecentricity of one of the light rays with which an ejection orifice that is at the smallest distance from the connection portion is irradiated is smaller than the absolute value of off-axis telecentricity of one of the light rays with which an ejection orifice that is at the largest distance from the connection portion is irradiated.