Piezoelectric/electrostrictive element and method for manufacturing the same
A piezoelectric/electrostrictive element (20) has a piezoelectric body (23), a through-hole electrode (24), a first electrode (25), a second electrode (21), a third electrode (22). The piezoelectric body (23) includes a through-hole (23a) in communication with a first main surface and a second main...
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Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A piezoelectric/electrostrictive element (20) has a piezoelectric body (23), a through-hole electrode (24), a first electrode (25), a second electrode (21), a third electrode (22). The piezoelectric body (23) includes a through-hole (23a) in communication with a first main surface and a second main surface. The through-hole electrode (24) is formed on an inner side surface of the through-hole (23a). The first electrode (25) is formed on the first main surface of the piezoelectric body (23). The first electrode (25) is connected to the through-hole electrode (24). The second electrode (21) is formed on the second main surface of the piezoelectric body (23). The second electrode (21) is connected to the through-hole electrode (24). The third electrode (22) is formed on the second main surface of the piezoelectric body (23). The third electrode (22) is isolated from the second electrode (21). A calculated average roughness in the inner side surface is larger than 0.11 ¼m and smaller than 16 ¼m. A maximum height roughness in the inner side surface is larger than 0.2 ¼m and smaller than 20 ¼m. |
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