MICROMECHANICAL ELEMENT, COMPONENT HAVING A MICROMECHANICAL ELEMENT, AND METHOD FOR PRODUCING A COMPONENT

A micromechanical element (123a) having a plurality of individual sensor elements (1′a, 2′a, 3′a, 23a), wherein a first physical measurement variable can be measured with a first individual sensor element (1′a, 2′a, 3′a, 23a) and a second physical measurement variable can be measured with a second i...

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Bibliographische Detailangaben
Hauptverfasser:	GÜNTHNER, STEFAN, SCHMID, BERNHARD
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS MEASURING MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TARIFF METERING APPARATUS TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	A micromechanical element (123a) having a plurality of individual sensor elements (1′a, 2′a, 3′a, 23a), wherein a first physical measurement variable can be measured with a first individual sensor element (1′a, 2′a, 3′a, 23a) and a second physical measurement variable can be measured with a second individual sensor element (1′a, 2′a, 3′a, 23a). A component is provided having at least one control electronics unit (1′b, 2′b, 3′b) which can be connected electrically to the micromechanical element (123a); wherein the micromechanical element (123a) and the control electronics unit (1′b, 2′b, 3′b) are arranged in a common housing (123c). A method for producing the component is further described.