APPARATUS AND METHOD FOR BALANCING COMBINED RF POWER-SUPPLIES FOR DRIVING A CO2 GAS-DISCHARGE LASER

Radio-frequency (RF) power supply apparatus for supplying RF power to discharge electrodes of a gas-discharge laser includes a plurality of amplifier modules each having an RF output. A power combining arrangement is provided for combining the amplifier module RF-outputs into a single combined RF-ou...

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Bibliographische Detailangaben
Hauptverfasser:	SCHMELZER, DAVID, P, HAUER, FREDERICK, W
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	AMPLIFIERS BASIC ELECTRIC ELEMENTS BASIC ELECTRONIC CIRCUITRY DEVICES USING STIMULATED EMISSION ELECTRICITY
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Beschreibung
Zusammenfassung:	Radio-frequency (RF) power supply apparatus for supplying RF power to discharge electrodes of a gas-discharge laser includes a plurality of amplifier modules each having an RF output. A power combining arrangement is provided for combining the amplifier module RF-outputs into a single combined RF-output connected to the discharge electrodes. A DC power supply is connectable to or disconnectable from each of the transistor amplifier modules, separately, to allow current drawn by any of the amplifier modules to be monitored by a single current sensor.