HIGH DEFINITION HEATER SYSTEM HAVING A FLUID MEDIUM

A thermal system includes a base member, a two-phase fluid, a tuning heater, and a chuck. The base member includes at least one fluid passageway. The two-phase fluid is disposed within the fluid passageway. A pressure of the two-phase fluid is controlled such that the two-phase fluid provides at lea...

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Bibliographische Detailangaben
Hauptverfasser:	LINDLEY, Jacob, Robert, BOLDT, Allen, Norman, SMITH, Kevin, Robert, SCHMIDT, Philip, Steven, PTASIENSKI, Kevin, SWANSON, Cal, Thomas, ZHANG, Sanhong, STEINHAUSER, Louis, P, DERLER, Ray, Alan, NOSRATI, Mohammad, GRIMARD, Dennis, Stanley
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	A thermal system includes a base member, a two-phase fluid, a tuning heater, and a chuck. The base member includes at least one fluid passageway. The two-phase fluid is disposed within the fluid passageway. A pressure of the two-phase fluid is controlled such that the two-phase fluid provides at least one of heating and cooling to the base member. The tuning heater is secured to the base member. The chuck is secured to the tuning heater opposite to the base member. The tuning heater includes a plurality of zones to fine tune a heat distribution provided by the base member to the chuck.