Substrate lamination method

A substrate lamination apparatus (100), the apparatus comprising: a vacuum chamber (110), a flexible membrane (120), the flexible membrane partitioning the vacuum chamber into a first compartment (121) and a second compartment (122), a substrate support (130), and a substrate alignment insert (140)...

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Bibliographische Detailangaben
Hauptverfasser:	NEMETH, PAUL R, MARZEN, VINCENT P, BARNIDGE, TRACY J, SAMPICA, JAMES D
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY LAYERED PRODUCTS LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM PERFORMING OPERATIONS SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	A substrate lamination apparatus (100), the apparatus comprising: a vacuum chamber (110), a flexible membrane (120), the flexible membrane partitioning the vacuum chamber into a first compartment (121) and a second compartment (122), a substrate support (130), and a substrate alignment insert (140) comprising a base portion (141) and at least one substrate alignment guide (142).