A thermal treatment apparatus for fabricating an absorbing layer of a solar cell

A thermal treatment apparatus for fabricating an absorbing layer of a solar cell

A method for fabricating an absorbing layer of a solar cell and a thermal treatment device (10) thereof adapted for forming an absorbing layer on a substrate (20) are disclosed. The method includes the following steps. First, a solid-phase vapor source (120) in a chamber (11) and an absorbing layer...

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Bibliographische Detailangaben
Hauptverfasser: WU, TSUNG-SHIN, HSU, HUNG-RU, CHANG, CHIA-WEN, WU, SHIH-HSIUNG
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A method for fabricating an absorbing layer of a solar cell and a thermal treatment device (10) thereof adapted for forming an absorbing layer on a substrate (20) are disclosed. The method includes the following steps. First, a solid-phase vapor source (120) in a chamber (11) and an absorbing layer precursor (30) on a substrate (20) are maintained by a predetermined distance (D) (S103). The solid-phase vapor source (120) contains tin. The absorbing layer precursor (30) contains copper, zinc, tin and sulfur. The temperature inside the chamber (11) is raised to a forming temperature, so that the absorbing layer precursor (30) forms an absorbing layer on the substrate (20) (S104).