TEMPORARY ADHESION OF CHEMICALLY SIMILAR SUBSTRATES

A temporary adhesive for reversibly bonding a silicon wafer to a silicon support contains a crosslinkable organopolysiloxanes composition and a fatty acid or salt thereof or fatty acid ester as a release regulator having a density different from the crosslinkable organopolysiloxanes composition of a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KÖLLNBERGER, ANDREAS, ACHENBACH, FRANK
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A temporary adhesive for reversibly bonding a silicon wafer to a silicon support contains a crosslinkable organopolysiloxanes composition and a fatty acid or salt thereof or fatty acid ester as a release regulator having a density different from the crosslinkable organopolysiloxanes composition of at least 0.1 g/cm3, which upon parting of the wafer from the substrate, the adhesive remains substantially adhered to the substrate.