ATMOSPHERIC MOLECULAR CONTAMINATION CONTROL WITH LOCAL PURGING

A local purging tool for purging a portion of a surface of a wafer with purging gas is disclosed. The purging tool includes a purging chamber configured to contain purging gas within a cavity of the purging chamber, a permeable portion of a surface of the purging chamber configured to diffuse purgin...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	KAACK, TORSTEN, DIXON, WARD, WANG, NING-YI NEIL, SANDHU, JAGJIT, KWAK, HIDONG
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CLEANING CLEANING IN GENERAL MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PERFORMING OPERATIONS PHYSICS PREVENTION OF FOULING IN GENERAL TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	A local purging tool for purging a portion of a surface of a wafer with purging gas is disclosed. The purging tool includes a purging chamber configured to contain purging gas within a cavity of the purging chamber, a permeable portion of a surface of the purging chamber configured to diffuse purging gas from the cavity of the chamber to a portion of a surface of a wafer, and an aperture configured to transmit illumination received from an illumination source to a measurement location of the portion of the surface of the wafer and further configured to transmit illumination reflected from the measurement location to a detector.